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UV etching machine
UV etching machine
Customer requirements

With high precision lead screw module THK component - Z axis with external second encoder system design, improve the electrical accuracy of Z axis High performance coreless motor +20 nm grating position feedback system, SP IKO roller guide configuration,

Advantages of the Plan

XY: Measured 

     Y-0.5μm/1.9μm [after compensation]

     X-0.5μm/1.8μm [after compensation] ≤2μm/4μm

Z: Measured 3μm/8μm [after compensation] ≤8μm/20μm

XYZ shafting pairwise verticality adjustment on site ≤0.01mm

Meet customer technical requirements and support R&D objectives