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Detection of wafer adhesion defects
Detection of wafer adhesion defects
Customer requirements

The size of the wafer is at the micrometer level. The resolution of ordinary high-magnification telecentric lenses is insufficient, resulting in poor image quality and inability to clearly identify features.

Advantages of the Plan

Liquid microlens resolution up to 1um, can clearly identify feature points, and its own integrated point light source, picture contrast is obvious;The matching liquid lens can realize the rapid adjustment of the focal plane of the microscope objective, and meet the detection needs of different heights under the condition of the static mechanism.

 

The shooting effect of liquid microlenses
The shooting effect of a common high-magnification lens